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Positive PR Light breaks chemical bonds Exposed area dissolved out Negative PR Light toughens chemical bonds Exposed area remains Image Reversal (only for specific positive PRs) Overdose of light + temp process causes chemical bonds to… Buy Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid Devices 2 by Richard C. Jaeger (ISBN: 9780201444940) from Amazon's Book Store. Get your Kindle here, or download a FREE Kindle Reading App.

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Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition) (Modular Series on Solid State Deviced, Vol 5) Richard C. Jaeger Published by Prentice Hall (2001)

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